US 6,184,970 B2 · Master plate transporting system

Abstract

A master plate transporting system automatically detects the presence/absence of master plates accommodated in a container and also detects the position of each master plate in the container as well as the type of the container being used. In this arrangement, the master plate transporting system executes the automatic transporting operation without transport errors. Containers each holding one or more reticles, are positioned in a semiconductor manufacturing apparatus. A reticle detection sensor detects the presence and the position of the reticle in each container. A controller controls the transporting operation of a reticle transporting mechanism based on the detection results of the detection sensor to reliably retrieve the reticle, transport it to an exposure system, and return it to the container.

Claims12

Dependent claims

An exposure apparatus for exposing an image pattern formed on a reticle onto an object, the exposure apparatus comprising:

an exposure system located between the reticle and the object to expose the image pattern onto the object;
a reticle storing system including an upper unit, a lower unit and a moving unit to store one or more reticles, said moving unit moving said one or more reticles between said upper unit and said lower unit;
a reticle transporting system cooperating with the reticle storing system, the reticle transporting system transporting the reticle between the reticle storing system and the exposure system;
and
an edge detector disposed facing a location where an edge of the reticle should be if present, the edge detector being positioned to detect the edge of the reticle in a non-contact manner while said moving unit moves said one or more reticles between said upper unit and said lower unit.

2 more elements

Dependencies are inferred from the claim text.

Master plate transporting system

Life of this patent

Master plate transporting system

Life of this patent

Abstract

Claims12