Method for preventing crosstalk between conductive layers
AssigneeUnited Microelectronics Corp.
InventorsKuan-Yu Fu, Shiang Huang-Lu
Life of this patent
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Abstract
A method for preventing horizontal and vertical crosstalk between conductive layers forms a dummy conductive layer between conductive layers and between conductive lines within a dielectric layer. The dummy conductive layer does not connect with conductive layers or conductive lines. Because the dummy conductive layer has a shielding effect for conductive layers, the method can reduce the horizontal and vertical crosstalk between conductive layers.
Claims8
A method for preventing horizontal crosstalk between conductive layers on a semiconductor device, comprising the steps of:
- providing a substrate having at least a first dielectric layer formed thereon;
- forming a plurality of conductive lines on the first dielectric layer;
- removing a portion of the exposed first dielectric layer to form a recess thereon to expose the first dielectric layer underlying the conductive lines;
- forming an insulation layer on the substrate;
- and
- forming a dummy conductive layer on the insulation layer, a portion of the dummy conductive layer being located between the conductive lines;
- forming a second dielectric layer over the substrate;
- and
- forming a patterned conductive layer on the second dielectric layer.
A method for preventing vertical crosstalk between conductive layers, comprising the steps of:
- forming a first dielectric layer on a substrate having at least a first conductive layer;
- forming a dummy conductive layer on the first dielectric layer;
- forming a second dielectric layer on the dummy conductive layer;
- forming a via hole through the second dielectric layer, the dummy conductive layer and the first dielectric layer to expose the first conductive layer;
- forming an insulation layer around the via hole;
- forming a via plug in the via hole;
- and
- forming a second conductive layer on the second dielectric layer, wherein the second conductive layer connects with the first conductive layer by the via plug and is shielded from the first conductive layer by the dummy conductive layer.
A method for preventing vertical crosstalk between conductive layers, comprising the steps of:
- forming a first dielectric layer on a substrate having at least a first conductive layer;
- forming a dummy conductive layer on the first dielectric layer;
- forming a second dielectric layer on the dummy conductive layer;
- forming a via hole through the second dielectric layer, the dummy conductive layer and the first dielectric layer to expose the first conductive layer;
- forming a spacer around the via hole;
- forming a via plug in the via hole;
- and
- forming a second conductive layer on the second dielectric layer, wherein the second conductive layer connects with the first conductive layer by the via plug.
Dependencies are inferred from the claim text.