US 6,184,099 B2Granted

Low cost deep sub-micron CMOS process

AssigneeNational Semiconductor Corporation

InventorsAlbert M. Bergemont, Christopher I. Michael

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Abstract

A low cost method of producing proper source/drain junctions and transistor characteristics is disclosed. Through consolidation of masking steps, source/drain processing has a significantly lower cost with no performance loss. A blanket boron implant is employed as both a PLDD implant for the PMOS and a halo region implant for the NMOS. After formation of sidewall spacers on the gates, a masked arsenic and phosphorous implant is employed as a N+ implant. Because the phosphorous drives in faster than the arsenic, the desired N+/NLDD/halo architecture is generated. A masked boron implant is then employed as the P+ implant. Thus, the source/drain junctions are formed using only two masked implants. In an alternative embodiment, a third masked implant of phosphorous is used to form the NLDD junction prior to the sidewall spacer deposition instead of phosphorous being implanted with the arsenic.

Claims17

Dependent claims

A method of forming source/drain junctions within a substrate, said method comprising:

forming active areas within said substrate, said active areas comprise NMOS regions and PMOS regions;
forming gate electrodes on the surface of said substrate, said gate electrodes formed over said active areas;
performing a blanket implant of a dopant of a first conductivity into said substrate, wherein said dopant of said first conductivity type is formed in the source/drain junctions of said active areas;
depositing a layer of dielectric material and etching said layer to form sidewall spacers adjacent each opposite sidewall of said gate electrodes;
forming a first mask on the surface of said substrate to expose only those active areas where it is desirable to introduce a dopant of a second conductivity type;
performing a first masked implant of said dopant of said second conductivity type into the exposed active areas of said substrate, wherein said dopant of said second conductivity type is aligned with said sidewall spacers, and wherein said dopant of said second conductivity type overcompensates for said dopant of said first conductivity type;
and
performing an annealing thermal cycle, wherein said annealing thermal cycle drives said dopant of said second conductivity type under said sidewall spacers to form a lightly doped drain region under said sidewall spacers wherein said dopant of said first conductivity type forms a lightly doped drain junction in said PMOS regions and a halo structure in said NMOS regions.

5 more elements

A method of forming source/drain junctions within a semiconductor substrate, said method comprising:

providing a substrate with an upper surface, said substrate having NMOS regions and PMOS regions;
forming gate electrodes on said surface of said substrate over said NMOS regions and over said PMOS regions;
performing a blanket implant of a first dopant into said substrate, wherein said blanket dopant forms lightly doped drain junctions in said PMOS region and halo regions in said NMOS regions;
depositing a layer of dielectric material and etching said layer to form sidewall spacers adjacent to the walls of said gate electrodes;
forming a first mask on the surface of said substrate to expose said NMOS regions of said substrate;
performing a masked implant of a second dopant into said NMOS regions of said substrate, wherein said second dopant is formed within said NMOS regions aligned with said sidewall spacers, said second dopant forms source/drain junctions within said NMOS regions;
and
performing an annealing thermal cycle for driving said second dopant under said sidewall spacers to form a lightly doped drain region under said sidewall spacers wherein said second dopant further forms lightly doped drain junctions in said NMOS regions, and wherein said remaining regions implanted with said first dopant define said halo regions.

5 more elements

Dependencies are inferred from the claim text.