Process for ultra smooth diamond coating on metals and uses thereof
AssigneeThe UAB Research Foundation
InventorsYogesh K. Vohra, Shane A. Catledge
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Abstract
The present invention provides a new process to deposit well adhered ultra smooth diamond films on metals by adding nitrogen gas to the methane/hydrogen plasma created by a microwave discharge. Such diamond coating process is useful in tribological/wear resistant applications in bio-implants, machine tools, and magnetic recording industry.
Claims12
A method of producing an ultra smooth diamond film having a surface roughness in the range of about 14 nanometers to about 100 nanometers, comprising the step of:
- adding nitrogen gas to methane/hydrogen plasma created by a microwave discharge, wherein said plasma provides chemical vapor deposition for the production of said diamond film.
A method of depositing an ultra smooth diamond film having a surface roughness in the range of about 14 nanometers to about 100 nanometers on a metal, comprising the step of:
- adding nitrogen gas to methane/hydrogen plasma created by a microwave discharge, wherein said plasma provides chemical vapor deposition for depositing said diamond film on said metal.
Dependencies are inferred from the claim text.