Processing apparatus

A processing apparatus comprising:

• a processing member for applying a designated treatment on a substrate;
• a motor for driving the processing member for rotation about a predetermined axis as a rotating center;
• and
• an adjustment mechanism for controlling a force exerted on the substrate by the processing member;
• wherein the adjustment mechanism includes a stationary element and a movable element, wherein the motor is fixed to the movable element, and wherein the movable element, the motor and the processing member are combined with each other so as to move together.

A processing apparatus comprising:

• a processing member for applying a designated treatment on a substrate;
• and
• a drive unit for driving the processing member, the drive unit including:
• a drive shaft for rotating the processing member, the drive shaft being movable upward and downward;
• first magnets secured on the drive shaft;
• second magnets secured on the drive shaft;
• first electromagnets arranged in the vicinity of the first magnets, for maintaining the drive shaft at a predetermined height due to electromagnetic force acting between the first magnet and the first electromagnet;
• and
• second electromagnets arranged in the vicinity of the second magnet, for moving the driving shaft in an axial direction thereof due to electromagnetic force acting between the second magnets and the second electromagnet.

A processing apparatus comprising:

• a processing member for applying a designated treatment on a substrate;
• a motor for rotationally driving the processing member;
• a shaft for connecting the motor to the processing member;
• elevating means for moving up and down the processing member, the motor and the shaft together.