Conveying device for thin disk-like articles
AssigneeSEZ Semicondcutor Equipment Zubehor fur Die Halbleiterfertigung AG
InventorWillibald Pirker
Life of this patent
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Abstract
A conveying device for thin disk-like articles (60), characterized by the llowing features: a support (10) having a plain surface (12), in the support (10) there is formed at least one gas channel (20) which channel, in running towards the plain surface in outwardly slanting manner, terminates at one of its ends in at least one gas outlet opening in the plain surface (12), the at least one gas channel being connectable to a gas supply pipe (28) at its other end, wherein at least three guiding arms (30) are disposed adjacent the at least one gas outlet opening(s) outside the at least one gas outlet opening and wherein the at least three guiding arms project beyond the plain surface (12) of the support (10) and are adjustable radially with respect to the plain surface (12).
Claims13
A conveying device for thin disk-like articles (60), characterized by the following features:
- a support (10) having a plain surface (12),
- in the support (10) there is formed at least one gas channel (20) which channel, in running towards the plain surface in outwardly slanting manner, terminates at one of its ends in at least one gas outlet opening in the plain surface (12), said at least one gas channel being connectable to a gas supply pipe (28) at its other end, wherein
- at least three guiding arms (30) are disposed adjacent the at least one gas outlet opening outside said at least one gas outlet opening and wherein said at least three guiding arms project beyond the plain surface (12) of the support (10) and are adjustable radially with respect to the plain surface (12).
Dependencies are inferred from the claim text.