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US 6,149,992 AGranted
Pellicle
AssigneeMitsui Chemicals, Inc.
InventorNorio Nakayama
Life of this patent
Estimating the term…
Abstract
The present invention makes it possible to provide a pellicle having, on the inside of the pellicle frame, a tacky layer which exhibits excellent performance for holding foreign matters such as dust or dirt suspended in space defined by the pellicle and the mask, and resistance against light of short wavelengths such as excimer beam. The pellicle comprises a pellicle frame, a pellicle film stretched on one side of said pellicle frame, and a tacky layer formed on the inside of said pellicle frame and containing a greasy fluorine-contained resin.
Claims19
A pellicle comprising:
- a pellicle frame,
- a pellicle film stretched on one side of said pellicle frame, and
- a tacky layer formed on the inside of said pellicle frame and containing a greasy fluorine-contained resin wherein said greasy fluorine-contained resin has a weight average molecular weight of from 1000 to 1500.
Dependencies are inferred from the claim text.