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US 6,147,321 AGranted
Configuration for the automatic inscription or reinscription of wafers
AssigneeInfineon Technologies AG
InventorsEckhard Marx, Detlef Gerhard, Jens Muller
Life of this patent
Estimating the term…
Abstract
A configuration for the automatic inscription or reinscription of wafers provides the wafers with a marking for identification and for process management during the production of semiconductor components. The wafer must be moved between different stations for the automatic inscription of a wafer in an appropriate device. Considerable transport movements are saved by the integration of a read station in an inscription chamber having a positioning unit for the wafer.
Claims3
A configuration for the automatic inscription of wafers, comprising:
- a supply cassette for supplying wafers;
- an inscription chamber having a positioning unit for predetermined alignment of a wafer received from said supply cassette and for maintaining the wafer on said positioning unit for an entire marking process;
- a storage cassette for storing wafers;
- a handling device for handling wafers between said supply cassette, said inscription chamber and said storage cassette;
- a laser unit for placing a marking on a wafer;
- and
- a read station disposed within said inscription chamber in such a manner that the marking is legible and a new marking can be applied on the wafer with said laser unit at a predetermined position.
4 more elements
Dependencies are inferred from the claim text.