Apparatus and method for forming a film on a tape substrate
AssigneeKorea Advanced Institute of Science and Technology
InventorsDo Jun Youm, Doo Hoon Goo, Sang Hyun Oh
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Abstract
This invention relates to an apparatus and method for forming a high temperature superconducting film on a tape substrate. In this invention, the superconducting film is deposited on the tape substrate wound around a cylindrical substrate holder inserted in an auxiliary chamber. The holder rotates during the whole deposition process. Vapors of film materials are supplied from a main chamber through an opening between the two chambers. According to the present invention, it is possible to form a highly uniform high temperature superconducting film on a tape substrate at high speeds suitable for large scale production. The manufacturing speed can easily be controlled by the size of the substrate holder.
Claims13
Apparatus for forming a film on a tape substrate, comprising:
- a main vacuum chamber;
- an auxiliary chamber having an opening to the main chamber;
- means for winding a tape substrate of continuous length, the winding means being inserted into the auxiliary chamber;
- and
- means for supplying vapors of film materials to the tape substrate through the opening.
A method for forming a film on a tape substrate, using an apparatus comprising a main chamber, an auxiliary chamber having an opening to the main chamber, means for winding a tape substrate which takes a cylindrical shape, and means in the main chamber for evaporation of film materials, the method comprising the steps of:
- inserting the winding means into the auxiliary chamber after winding the tape substrate thereon;
- removing impurities and natural oxide layer from the tape substrate;
- forming a buffer layer on the tape substrate to prevent the constituents of the tape substrate from permeating the film to be deposited;
- and
- depositing a film on the tape substrate by evaporating at least one film material through the opening while rotating the winding means.
Dependencies are inferred from the claim text.