Method of manufacturing a semiconductor device that uses a calibration standard
AssigneeMotorola, Inc.
InventorsLaurie A. Goldstein, Timothy J. Warfield, Jane K. Gates, Elizabeth Apen
Life of this patent
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Abstract
A semiconductor wafer (11) having a dielectric layer (12) is used as a calibration standard (10) to calibrate thickness measuring equipment in a wafer processing or manufacturing area. The thickness of the dielectric layer (12) is maintained to a desired thickness by heating the calibration standard (10) to remove contaminants from the dielectric layer (12).
Claims4
A method of manufacturing a semiconductor device comprising:
- providing a semiconductor wafer having a thickness wherein the semiconductor wafer is used as a calibration standard;
- heating the semiconductor wafer in an ambient environment that includes a gas that is one of oxygen, nitrogen, or an inert gas wherein the ambient environment has an amount of the gas that is sufficient to ensure the gas is a main component of the ambient environment for removing a portion of the thickness wherein heating the semiconductor wafer to remove the portion of the thickness includes heating a dielectric layer of the semiconductor wafer to remove the portion of the dielectric layer;
- and
- using the semiconductor wafer to calibrate equipment used in manufacturing the semiconductor device.
A method of maintaining a calibration standard for a semiconductor wafer processing area comprising:
- providing a semiconductor wafer having a dielectric layer on the semiconductor wafer, the dielectric layer having a thickness wherein the semiconductor wafer is used as a calibration standard;
- heating the semiconductor wafer in an ambient environment that includes a gas that is one of oxygen, nitrogen, or an inert gas wherein the ambient environment has an amount of the gas that is sufficient to ensure the gas is a main component of the ambient environment for removing a portion of the thickness;
- and
- using the semiconductor wafer to calibrate equipment used in the semiconductor wafer processing area.
A method of maintaining a calibration standard for a semiconductor wafer processing area comprising:
- providing a semiconductor wafer having a dielectric layer on the semiconductor wafer, the dielectric layer having a thickness wherein the semiconductor wafer is used as a calibration standard;
- heating the semiconductor wafer in an ambient environment that includes a gas that is one of oxygen, nitrogen, or an inert gas wherein the ambient environment has an amount of the gas that is sufficient to ensure the gas is a main component of the ambient environment for removing a portion of the thickness;
- and
- using the semiconductor wafer to calibrate equipment used in the semiconductor wafer processing area by using the semiconductor wafer to calibrate equipment used to measure a thickness of other semiconductor wafers.
Dependencies are inferred from the claim text.