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US 6,146,456 AGranted
Method for annealing single crystal fluoride and method for manufacturing the same
AssigneeNikon Corporation
InventorsTsutomu Mizugaki, Shuuichi Takano
Life of this patent
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Abstract
An annealing method for a single crystal of fluoride is provided. The method includes the steps of removing at least one of attached objects and absorbed objects from the surface of the single crystal of fluoride to clean the surface, thereafter annealing the single crystal of fluoride, including heating the single crystal of fluoride and gradually cooling the heated single crystal of fluoride, and removing a deteriorated layer which is formed on the surface of the single crystal of fluoride during the annealing step.
Claims28
An annealing method for a single crystal of fluoride, comprising the steps of:
- removing at least one of attached objects and absorbed objects from the surface of the single crystal of fluoride to clean the surface to prepare for annealing to be performed thereafter;
- and
- thereafter annealing the single crystal of fluoride, including heating the single crystal of fluoride at a temperature lower than a melting point of the single crystal of fluoride and gradually cooling the heated single crystal of fluoride,
- wherein the step of annealing includes the steps of:
- housing the single crystal of fluoride in an airtight container of an annealing apparatus, including housing the single crystal of fluoride in the airtight container of the annealing apparatus that includes a plurality of individually controllable heaters arranged outside of the container and a plurality of thermal insulation members for preventing heat transfer from the inside of the container to the outside of the container, the thermal insulation members of the annealing apparatus including plate-shaped members arranged in the container;
- vacuuming the airtight container until the inside of the airtight container reaches a vacuum pressure;
- heating the vacuumed container to the temperature lower than the melting point of the single crystal of fluoride;
- maintaining the temperature for a fixed period of time;
- and
- gradually lowering the temperature of the container.
7 more elements
An annealing method for a single crystal of fluoride, comprising the steps of:
- annealing the single crystal of fluoride, including heating the single crystal of fluoride at a temperature lower than a melting point of the single crystal of fluoride and gradually cooling the heated single crystal of fluoride wherein the internal temperature fluctuation in the single crystal of fluoride is controlled to be within about 5.degree. C. during the annealing;
- and
- removing a deteriorated layer which is formed on the surface of the single crystal of fluoride during the annealing step.
An annealing method for a single crystal of fluoride, comprising the steps of:
- removing at least one of attached objects and absorbed objects from the surface of the single crystal of fluoride to clean the surface to prepare for annealing to be performed thereafter;
- thereafter annealing the single crystal of fluoride, including heating the single crystal of fluoride at a temperature lower than a melting point of the single crystal of fluoride and gradually cooling the heated single crystal of fluoride;
- and
- removing a deteriorated layer which is formed on the surface of the single crystal of fluoride during the annealing step.
1 more element
A manufacturing method of a high quality single crystal of fluoride, comprising the steps of:
- growing a single crystal of fluoride by fusing a fluoride material in a crucible and gradually cooling the fused fluoride material;
- annealing the single crystal of fluoride, including heating the single crystal of fluoride at a temperature lower than a melting point of the single crystal of fluoride and gradually cooling the heated single crystal of fluoride, wherein the internal temperature fluctuation in the single crystal of fluoride is controlled to be within about 5.degree. C. during the annealing;
- and
- removing a deteriorated layer which is formed on the surface of the single crystal of fluoride during the annealing step.
1 more element
A manufacturing method of a high quality single crystal of fluoride, comprising the steps of:
- growing a single crystal of fluoride by fusing a fluoride material in a crucible and gradually cooling the fused fluoride material;
- removing at least one of attached objects and absorbed objects from the surface of the single crystal of fluoride to clean the surface to prepare for annealing to be performed thereafter;
- thereafter annealing the single crystal of fluoride, including heating the single crystal of fluoride at a temperature lower than a melting point of the single crystal of fluoride and gradually cooling the heated single crystal of fluoride;
- and
- removing a deteriorated layer which is formed on the surface of the single crystal of fluoride during the annealing step.
2 more elements
An annealing method for a single crystal of fluoride, comprising the steps of:
- removing at least one of attached objects and absorbed objects from the surface of the single crystal of fluoride to clean the surface to prepare for annealing to be performed thereafter, including applying an organic mixed solvent of acetone and ethanol to the surface of the single crystal of fluoride;
- and
- thereafter annealing the single crystal of fluoride, including heating the single crystal of fluoride at a temperature lower than a melting pont of the single crystal of fluoride and gradually cooling the heated single crystal of fluoride.
A manufacturing method of a high quality single crystal of fluoride, comprising the steps of:
- growing a single crystal of fluoride by fusing a fluoride material in a crucible and gradually cooling the fused fluoride material;
- removing at least one of attached objects and absorbed objects from the surface of the single crystal of fluoride to clean the surface to prepare for annealing to be performed thereafter, including applying an organic mixed solvent of acetone and ethanol to the surface of the single crystal of fluoride;
- and
- thereafter annealing the single crystal of fluoride, including heating the single crystal of fluoride at a temperature lower than a melting point of the single crystal of fluoride and gradually cooling the heated single crystal of fluoride.
1 more element
Dependencies are inferred from the claim text.