Method for manufacturing carbon nanotubes as functional elements of MEMS devices
AssigneeXidex Corporation
InventorVladimir Mancevski
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Abstract
A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nanosize hole or catalyst retaining structure is fabricated on the MEMS substrate in which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.
Claims69
A method for manufacturing at least one carbon nanotube as a functional elements of a MEMS device, comprising the steps of:
- preparing a MEMS substrate for growth of the at least one carbon nanotube;
- creating a nanosize catalyst retaining structure in a first layer at a location on said MEMS substrate, wherein said location determines a position of the at least one carbon nanotube on said MEMS substrate;
- placing a nanotube catalyst within said nanosize catalyst retaining structure;
- and
- synthesizing the at least one carbon nanotube within said catalyst retaining structure.
A method for manufacturing at least one carbon nanotube as a functional elements of a MEMS device, comprising the steps of:
- preparing a MEMS substrate for growth of the at least one carbon nanotube;
- creating a nanosize catalyst retaining structure in a first layer at a location on said MEMS substrate, wherein said location determines a position of the at least one carbon nanotube on said MEMS substrate;
- placing a nanotube catalyst on a lower surface within said nanosize catalyst retaining structure;
- and
- synthesizing the at least one carbon nanotube within said catalyst retaining structure.
A method for manufacturing patterns of carbon nanotubes as functional elements of MEMS devices, comprising the steps of:
- preparing a MEMS substrate for growth of the patterns of carbon nanotubes;
- creating a nanosize catalyst retaining structure in a first layer at a location on said MEMS substrate, wherein said location determines a position of the patterns of carbon nanotubes on said MEMS substrate;
- placing a nanotube catalyst within said nanosize catalyst retaining structure;
- and
- synthesizing the patterns of carbon nanotubes within said catalyst retaining structure.
A method for manufacturing at least one carbon nanotube, comprising the steps of:
- creating at least one nanosized catalyst retaining structure;
- and
- forming the at least one carbon nanotube within said at least one nanosized catalyst retaining structure.
Dependencies are inferred from the claim text.