Substrate transferring apparatus and substrate processing apparatus using the same
AssigneeTokyo Electron Limited
InventorTatsuya Iwasaki
Life of this patent
Estimating the term…
Abstract
A substrate transferring apparatus comprising support members for supporting a substrate, and a drive mechanism for moving the support members to transfer the substrate, wherein the support members each have a pair of outer support segments for supporting an outer periphery of the substrate and a pair of inner support segment provided between the outer support segments.
Claims16
A substrate transferring apparatus for transferring a rectangular substrate while moving on a transferring path, comprising:
- support members for supporting the rectangular substrate, said support members each having a pair of outer support segments for supporting opposite side edges of the rectangular substrate, respectively, and at least one inner support segment provided between said outer support segments;
- a base member for supporting the support members movably;
- a driving mechanism, provided in said base member, for moving said support members;
- a main body supporting said base member, and moving on said transferring path;
- an exhausting path extending downward through said main body from a portion close to said driving mechanism;
- and
- exhausting means for exhausting an interior of said base member through said exhausting path.
A substrate processing apparatus for subjecting a predetermined process to a rectangular substrate, comprising:
- a processing section for providing the predetermined process to the rectangular substrate;
- and
- a substrate transferring machine for transferring the rectangular substrate while moving on a transferring path in said processing section,
- said substrate transferring apparatus comprising:
- support members for supporting the rectangular substrate, said support members each having a pair of outer support segments for supporting opposite side edges of the rectangular substrate and at least one inner support segment provided between said outer support segments;
- a base member for supporting the support members movably;
- a driving mechanism, provided in the base member, for moving said support members;
- a main body supporting said base member, and moving on said transferring path;
- an exhausting path for exhausting downward through said main body from a portion close to said driving mechanism;
- and
- exhausting means for exhausting an interior of said base member through said exhausting path.
A substrate transferring apparatus comprising:
- a base member moving up and down and having a base plate;
- support members mounted on said base member for supporting a rectangular substrate, said support members each having a pair of outer support segments for supporting opposite side edges of the rectangular substrate, respectively, and at least one inner support segment provided between said outer support segments;
- a drive unit provided in said base member for moving said support members to transfer the substrate, said drive means having motors attached to said base plate;
- and
- a shielding plate provided between a portion closer to a central portion of said base plate and a position at which said drive means is arranged.
Dependencies are inferred from the claim text.