Wafer transfer cassette

A wafer transfer cassette comprising:

• a support frame including first and second vertically extending metal support structures which are horizontally spaced from one another;
• a first poly ethyl ethyl ketone wafer supporting construction comprising:
• a first bracket portion having a first opening formed therein;
• a first ring in the first opening having an outer surface which engages with the first opening, and an inner surface which is threaded;
• and
• a first fin portion extending from the first bracket portion;
• a first fastener which threadably engages with the inner surface of the first ring to secure the first bracket portion to the first support structure so that the first fin portion extends from the first bracket portion towards the second support structure;
• a second poly ethyl ethyl ketone wafer supporting construction comprising:
• a second bracket portion having a second opening formed therein;
• a second ring in the second opening having an outer surface which engages with the second opening and an inner surface which is threaded;
• and
• a second fin portion extending from the second bracket portion;
• and
• a second fastener which threadably engages with the inner surface of the second ring to secure the second bracket portion to the second support structure so that the second fin portion extends from the second support structure towards the first support structure, the first and second fin portions having upper surfaces positioned relative to one another so as to be capable of jointly supporting a wafer, having a diameter of at least 300 millimeters, in substantially a horizontal orientation.