Process and structure for increasing capacitance of stack capacitor
AssigneeMosel Vitelic, Inc.
InventorChung-Cheng Wu
Life of this patent
Estimating the term…
Abstract
The present invention provides a process and a structure for increasing a capacitance of a stack capacitor. The process includes steps of: a) forming a contact hole on a silicon substrate having an oxide layer, b) forming a polysilicon contact plug of a first polysilicon layer in the contact hole; c) forming a second gibbous polysilicon layer on a surface of the contact plug, and d) forming a third polysilicon layer above the gibbous polysilicon layer and a portion of the oxide layer to form the stack capacitor, wherein the gibbous polysilicon layer increases the capacitance of the stack capacitor.
Claims4
A structure for increasing a capacitance of a stack capacitor on a silicon substrate comprising:
- said silicon substrate;
- an oxide layer formed on said silicon substrate and provided with a contact hole;
- a first polysilicon layer forming a contact plug in said contact hole and having a gibbous surface of said contact plug;
- and
- a second polysilicon layer formed above said gibbous surface of said contact plug to form said stack capacitor, wherein said second polysilicon layer on said gibbous surface of said contact plug is a rugged polysilicon layer for increasing said capacitance of said stack capacitor.
Dependencies are inferred from the claim text.