Method and apparatus for controlling semiconductor wafer fabrication equipment based on a remaining process time applicable to the processors

Semiconductor wafer fabrication equipment comprising:

• processing means for processing semiconductor wafers;
• storage means for storing semiconductor wafers, said storage means being furnished corresponding to said processing means;
• first transport means for transporting semiconductor wafers between said processing means and said storage means;
• and second transport means for transporting semiconductor wafers between process regions each made up of said processing means, of said storage means and of said first transport means, said process regions being furnished as many as needed;
• said semiconductor wafer fabrication equipment further comprising a semiconductor wafer supply device and a semiconductor wafer output device;
• said semiconductor wafer supply devices including:
• semiconductor wafer selecting means for selecting semiconductor wafers to be processed by processing means on the basis of a remaining process time applicable to said processing means included in said semiconductor wafer fabrication equipment;
• and
• transporting means for transporting the semiconductor wafers selected by said semiconductor wafer selecting means to said processing means;
• and
• said semiconductor wafer output device including:
• transport destination selecting means for selecting a transport destination constituted by either processing means or storage means to which to transport the semiconductor wafers having been processed by said processing means;
• and
• transporting means for transporting the processed semiconductor wafers to either the processing means or the storage means selected by said transport destination selecting means in accordance with a transport control changeover code read from said processing means and said storage means furnished in said semiconductor wafer fabrication equipment.