Storage container for precision substrates
AssigneeShin-Etsu Polymers Co., Ltd.
InventorsYoshiaki Fujimori, Masato Takahashi, Toshiyuki Kamada
Life of this patent
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Abstract
A storage container for multiple wafers in alignment in its pod, includes: a hollow door element which opens and hermetically closes the open front of the pod; and a guide arrangement for guiding and positioning the door element into the open front when the door element is closed. This guide arrangement is configured of a first inclined guide portion, at least, formed in the underpart of the opening of the pod, gradually going outwards toward the distal end; and a second inclined guide portion, at least, formed in the underpart of the periphery of the door element, gradually going outwards from the inner side to the outer side and coming in contact with the first inclined guide portion when the door element is closed.
Claims7
A storage container for precision substrates comprising:
- a container body having an opening formed on one end face and storing precision substrates therein;
- a door element which can open and close the opening in a hermetic manner;
- and
- guide means for guiding and positioning the door element with respect to the opening of the container body when the door element is closed,
- wherein the guide means comprises:
- a depressed mating portion, at least, formed on either the underpart of the opening or the underpart of the door element periphery;
- and a mating projection, at least formed on the remaining underpart of either the opening or the door element periphery so as to mate with the depressed mating portion when the door element is closed, and the contact surface between the depressed mating portion and the mating projection is inclined as going outwards, from its proximal point closer to the opposed face toward the open face.
A storage container for precision substrates comprising:
- a container body having an opening formed on one end face and storing precision substrates therein;
- a door element which is substantially hollow and can open and close one open face in a hermetic manner;
- and
- a locking means for fixing the door element in a closed state, wherein the locking means comprises:
- a clamp bore formed on the inner peripheral surface of the open face of the container body;
- a passage opening provided in the peripheral surface of the door element;
- a rotary element which is incorporated in the door element and rotated from an external access;
- an actuation transmitting element which is actuated by the rotation of the rotary element to advance outwards and retract inwards within the door element;
- and a clamp element which projects out through the passage opening and fits into the clamp bore when the actuation transmitting element advances and returns inside the passage opening when the actuating element retracts,
- wherein the clamp element comprises:
- a first arm attached rotatably to the distal end of the actuation transmitting element;
- and a second arm, of a bent shape, attached to the distal end of the first arm, and the distal end of the second arm forms an insert-fastening fitting into the clamp bore while the proximal end of the second arm is supported at a point in proximity to the passage opening inside the door element, so that the second arm can rotate inwards and outwards with respect to the door element.
Dependencies are inferred from the claim text.