Semiconductor wafer boat with reduced wafer contact area
AssigneeSamsung Electronics Co., Ltd.
InventorsJi-hoon Hong, Ki-heum Nam
Life of this patent
Estimating the term…
Abstract
A boat for semiconductor wafers has reduced contact surface area with the wafer, thereby preventing distortion of the wafer during heating. The boat has an upper member; a lower member, a plurality of wafers being loaded between the upper member and the lower member; and a plurality of support members vertically extended between and connecting the upper member to the lower member for supporting the wafers. A plurality of slots are successively and horizontally formed in each of the support members, and the peripheral edge of the wafer is inserted therein, wherein a hemisphere-shaped protrusion is formed inside the slot, and the bottom surface of the wafer contacts and is supported by each hemisphere-shaped protrusion at a single contact point.
Claims6
A boat for housing semiconductor wafers comprising:
- an upper member;
- a lower member;
- a plurality of support members vertically extended between and connecting the upper member to the lower member for supporting the wafers;
- and
- a plurality of slots successively and horizontally formed in each of the support members, each slot having a hemisphere-shaped protrusion formed on a lower surface thereof, wherein a peripheral edge of a wafer is inserted into the slot such that a bottom surface of the wafer contacts and is supported by the hemisphere-shaped protrusion.
A boat for housing semiconductor wafers comprising:
- an upper member;
- a lower member;
- a plurality of support members vertically extended between and connecting the upper member to the lower member for supporting the wafers;
- and
- a plurality of ring-shaped mounting plates vertically stacked and supported between the support members at a constant interval from each other, each ring-shaped mounting plate having an upper base surface, and a protrusion protruding from said upper base surface and extending along said upper base surface as a ring encircling a central area of the boat, the ring-shaped protrusion of each of said mounting plates having a semicircular cross section so as to provide an annular line of contact at the top thereof, wherein a bottom surface of a wafer inserted between two adjacent mounting plates contacts and is supported by the annular line of contact provided at the top of the ring-shaped protrusion.
Dependencies are inferred from the claim text.