Apparatus and method for optically measuring an object surface contour

An optical metrology system for measuring object surface contours, the system comprising:

• a plurality of optical assemblies arranged proximate to opposing surfaces of the object surface, each including,
• at least one radiation source configured to project a substantially linear beam of imagable electromagnetic radiation on a substantially linear portion of an opposing surface of the object, and
• a camera having a column of detector elements substantially parallel with and proximate to the opposing surface and configured to receive the electromagnetic radiation reflected from the proximate object surface, wherein the portion of the object surface is substantially aligned with said column of detector elements;
• first adjustment apparatus constructed and arranged to adjust a distance between said at least one radiation source and the proximate object surface, said adjustment occurring along a first axis of the object;
• and
• second adjustment apparatus constructed and arranged to adjust a relative position of the object and said plurality of optical assemblies in a direction substantially parallel with said first axis of the object.

An optical metrology system for measuring cross-sections of an object substantially orthogonal to an axis of the object, the system comprising:

• an optical assembly arranged proximate to a surface of a predetermined section of the object, including,
• a first and a second light source, each configured to project a substantially parallel linear beam on the proximate object surface, and
• a line scan camera having a column of detector elements substantially parallel with the proximate object surface configured to receive light reflected from the proximate object surface;
• first object adjustment device constructed and arranged to adjust a distance between said first and second light sources and the object to cause said first and second beams to intersect each other at a scanning region that traverses the object surface substantially aligned with said column of detector elements;
• and
• second object adjustment device constructed and arranged to rotate the object to place an opposing side of the object at said predetermined section in alignment with said column of detector elements.