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US 6,092,937 AGranted
Linear developer
AssigneeFAStar, Ltd.
InventorsOcie T. Snodgrass, Gregory M. Gibson, Carl W. Newquist
Life of this patent
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AssigneeFAStar, Ltd.
InventorsOcie T. Snodgrass, Gregory M. Gibson, Carl W. Newquist
Estimating the term…
The inventive dispenser mechanism uniformly develops a photosensitive layer on a substrate. The mechanism uses a developer head that moves in a substantially linear relative motion with respect to the substrate and dispenses a developer at a controlled rate. Contact of the developer material with the photosensitive layer commences a chemical reaction of developing. The mechanism also uses a rinse head that has the same motion as the developer head and travels at the same velocity. The rinse head dispenses a rinse material at a controlled rate. Contact of the rinse material with the developer material on the photosensitive layer retards the chemical reaction of developing. The rinse head waits for a predetermined dwell period after the developer head has dispensed the developer material before dispensing the rinse material. The mechanism may also use a suction head that has the same motion and velocity and removes loose material on a surface of the substrate.
A method for uniformly developing a photosensitive layer on a substrate, the method comprising the steps of:
A dispenser that uniformly develops a photosensitive layer on a substrate, the dispenser comprising:
Dependencies are inferred from the claim text.