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US 6,069,392 AGranted
Microbellows actuator
AssigneeCalifornia Institute of Technology
InventorsYu-Chong Tai, Xing Yang
Life of this patent
Estimating the term…
Abstract
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.
Claims41
An actuator membrane, comprising:
- a support substrate having a back side, wherein said back side is formed with an opening for receiving deflecting force;
- a first layer of structural material formed on said support substrate and connected to said support substrate at a first location near an outer perimeter of said first layer and having an inner perimeter proximate said opening;
- an intermediate layer of structural material, on top of said first layer, said intermediate layer being connected to said first layer at a second location near said inner perimeter of said first layer;
- another layer of structural material on top of said intermediate layer, said another layer being connected to said intermediate layer at a third location near an outer perimeter of said intermediate layer;
- wherein said first layer and said intermediate layer are separated by a first space to allow deflection of said first layer;
- and
- said intermediate layer and said another layer are separated by a second space to allow deflection of said intermediate layer.
4 more elements
An actuator membrane, comprising:
- a membrane structure having multiple layers, wherein said layers are stacked on top of each other in an offset manner, wherein each layer having two ends is connected to another layer at alternating ends forming discrete joints thereby creating an offset, folded configuration;
- and
- when actuated, said membrane structure is capable of deflecting a certain vertical distance.
A microbellows actuator, comprising:
- a support substrate;
- a membrane formed on said support substrate having a first layer, an intermediate layer, and another layer, each layer having two ends, said first layer is connected to said intermediate layer at one end of said intermediate layer, said intermediate layer and said another layer is connected at the alternating end of said intermediate layer, thereby creating an offset, folded membrane;
- a space separating each layer, wherein said space is coupled to another space in between the next adjacent layers forming a central space for a force to enter during actuation;
- and
- an opening in said support substrate coupled to said central space that allows a force to be applied.
2 more elements
A thermopneumatic actuator, comprising:
- a support substrate having a back side, wherein said back side is formed with an opening that allows force to enter thereby deflecting the apparatus;
- a membrane structure having multiple layers, wherein said layers are stacked on top of each other in a bellows-like manner, wherein each layer having two ends is connected to another layer at alternating ends forming discrete joints thereby creating an offset, folded configuration, when actuated, said membrane structure is capable of deflecting a certain vertical distance;
- a cavity for filling of fluid coupled to said support substrate;
- a heater positioned to heat said fluid to produce a force for actuating said membrane.
1 more element
A thermopneumatic actuator, comprising:
- a support substrate having a back side, wherein said back side is formed with an opening that allows force to enter thereby deflecting the apparatus;
- a membrane structure;
- a cavity for filling of fluid coupled to said support substrate;
- a suspended resistive heater positioned in said cavity to heat said fluid to produce a force for actuating said membrane, wherein said fluid surrounds said suspended resistive heater at least at a top, a bottom, and side edges thereof.
1 more element
A suspended resistive heater, comprising:
- support frame;
- a heater support substrate layer formed on said support frame having a plurality of holes therein;
- and
- a plurality of heating resistors formed on said heater support substrate layer in between said plurality of holes.
1 more element
Dependencies are inferred from the claim text.