Micromachined peristaltic pumps
OwnerFrank T. Hartleyinventor
Life of this patent
Estimating the term…
Abstract
Micromachined pumps including a channel formed between a first membrane and a substrate or between first and second flexible membranes. A series of electrically conductive strips is applied to a surface of the substrate or one of the membranes. Application of a sequential voltage to the series of strips causes a region of closure to progress down the channel to achieve a pumping action.
Claims37
A microminiature pump structure forming at least part of a microminiature pump, said pump structure comprising;
- a flexible membrane;
- means attached to said membrane for forming a fluid-tight channel therewith;
- and
- means for attracting said membrane into said channel so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to create a pumping action.
A stack of pump structures, each pump structure comprising at least part of a respective pump, each pump structure comprising:
- a flexible membrane;
- means attached to said membrane for forming a fluid-tight channel therewith;
- and
- means for attracting said membrane into said channel so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to create a pumping action.
A microminiature pump structure forming at least part of a microminiature pump, said pump structure comprising:
- a first flexible membrane;
- means including a second flexible membrane attached to said first membrane for forming a fluid-tight channel therewith;
- and
- means for attracting said first and second membrane toward one another so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to create a pumping action.
A microminiature tube structure comprising:
- a first flexible membrane;
- means including a second flexible membrane attached to said first membrane for forming a fluid-tight channel therewith;
- and
- means for attracting said first and second membranes toward one another so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to cause said tube structure to move over a surface.
A microminiature pump structure forming at least part of a microminiature pump, said pump structure comprising:
- a fluid tight channel including a flexible membrane;
- and
- means for attracting said membrane into said channel so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to create a pumping action.
Dependencies are inferred from the claim text.