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US 6,002,161 AGranted
Semiconductor device having inductor element made of first conductive layer of spiral configuration electrically connected to second conductive layer of insular configuration
AssigneeNEC Corporation
InventorToru Yamazaki
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Abstract
The semiconductor device includes an inductor element which includes a first conductive film pattern of a spiral configuration formed on a major face of a semiconductor substrate, and second conductive film patterns of an insular configuration electrically connected only to the first conductive film pattern through contact holes formed in an inter-layer insulation film and extending in an overlapping relationship with the first conductive film pattern.
Claims27
A semiconductor device, comprising:
- an inductor element formed on a semiconductor substrate and including a first conductive film of a spiral configuration, and a second conductive film of an insular configuration.
- wherein the insular configuration of said second conductive film includes a plurality of conductive elements that are electrically isolated from one another but are electrically connected to said first conductive film respectively through a plurality of contacts formed in an inter-layer insulation film disposed between the first and second conductive films.
A semiconductor device comprising:
- a semiconductor substrate;
- an inductor element formed on the semiconductor substrate and including a first conductive film and a second conductive film;
- and
- an insulation layer disposed between the first and second conductive films,
- wherein the first conductive film has a spiral configuration and the second conductive film has a plurality of conductive elements that are electrically isolated from one another but are electrically connected to the first conductive film respectively through a plurality of contacts formed in the insulator layer.
2 more elements
A semiconductor device comprising:
- a semiconductor substrate;
- an inductor element formed on the semiconductor substrate and including a first conductive film of a contiguous spiral configuration and a second conductive film of a non-contiguous spiral configuration;
- and
- an insulation layer disposed between the first and second conductive films,
- wherein non-contiguous elements of the second conductive film are electrically connected to the first conductive film respectively through a plurality of contacts formed in the insulator layer.
2 more elements
Dependencies are inferred from the claim text.