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US 6,000,280 AGranted
Drive electrodes for microfabricated torsional cantilevers
AssigneeCornell Research Foundation, Inc.
InventorsScott A. Miller, Kimberly L. Turner, Noel C. MacDonald
Life of this patent
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Abstract
A comb-type actuator for movable microelectromechanical structures includes first and second asymmetric sets of interdigitated fingers. Asymmetry is obtained by fabricating on set of fingers to have a greater height than the other set, or by providing electrically insulating segments in one set. Application of a voltage across the sets produces an asymmetric field between them and produces relative motion.
Claims18
A comb-type actuator for microelectromechanical structures, comprising:
- a first set of fingers mounted on a substrate;
- a second set of fingers mounted on a movable structure for relative motion with respect to said first set of fingers, the fingers of said first set being interdigitated with the fingers of said second set, said first and said second sets of fingers being asymmetrical;
- and
- a voltage source connected to produce an electric field between said first and said second sets of fingers to thereby produce a predetermined relative motion between said sets of fingers.
1 more element
Dependencies are inferred from the claim text.