Process of manufacturing solid oxygen ion conducting oxide layers
OwnerArnold O. Isenberginventor
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Abstract
Electrochemical vapor deposition (EVD) of oxygen ion conducting and mixed conducting, oxygen-ionic/electronic, oxide layers is achieved at near atmospheric pressure process conditions by employing metals and metal compounds for removal and/or recovery of the free halogen byproduct of the EVD reaction. The metals and metal compounds are employed as solids, vapors, and as oxides in intimate mixture with carbon directly within the deposition zone together with the substrates to be coated. The process leads to significant cost reduction, for instance, in the fabrication of thin layers of solid oxygen ion conducting electrolytes, for fuel cells, gas separators, and gas sensors, when compared to state-of-the-art EVD processes which are conducted under vacuum conditions.
Claims20
An electrochemical vapor deposition process for the fabrication of oxygen ion conducting oxide layers in a deposition chamber by an electrochemically induced reaction of vaporized metal halides with oxygen from at least one of oxygen gas and oxygen containing reactants to form said oxygen ion conducting oxide layers as the reaction product, comprising the steps of :
- reacting metal halide vapors with oxygen ions stemming from said oxygen gas or said oxygen containing reactants to form said oxygen ion conducting oxide layers, maintaining said oxygen gas and said oxygen containing reactants separated from said metal halide vapors by said oxygen conducting oxide layers, whereby oxygen stemming from said oxygen gas or oxygen reactants at one side of said oxygen ion conducting oxide layer diffuses as oxygen ions through said oxygen ion conducting oxide layers and reacts with said vaporized metal halides at the other side of said oxygen ion conducting oxide layers so as to form metal oxides and causing growth in thickness of said oxygen ion conducting oxide layers while, at the same time, forming free halide as reaction byproduct, and reacting free halide with zinc metal vapor present at said other side of said oxygen ion conducting oxide layers thereby forming zinc halide vapor resulting in an increased growth rate of said oxide layers.
An electrochemical vapor deposition process for the fabrication of oxygen ion conducting oxide layers of rare earth element stabilized zirconium oxide in a deposition chamber by an electrochemically induced reaction of vaporized halides of rare earth elements and zirconium with oxygen from at least one of oxygen gas and oxygen containing reactants to form said oxygen ion conducting layers as the reaction product, comprising the steps of:
- reacting vaporized halides with oxygen ions stemming from said oxygen gas or said oxygen containing reactants to form said oxygen ion conducting oxide layers, maintaining said oxygen gas and said oxygen containing reactants separated from said vaporized halides by said oxygen ion conducting oxide layers, whereby oxygen stemming from said oxygen gas oxygen reactants at one side of said oxygen ion conducting oxide layer diffuses as oxygen ions through said oxygen ion conducting oxide layers and reacts with said vaporized metal halides at the other side of said oxygen ion conducting oxide layers so as to form metal oxides and causing growth in thickness of said oxygen ion conducting layers while, at the same time, forming free halide as reaction byproduct, and reacting said free halide with a mixture of rare earth element-stabilized zirconium oxide and carbon thereby increasing the growth rate of said ion conducting oxide layers.
An electrochemical vapor deposition process for the fabrication of oxygen ion conducting layers of solid state solutions of rare earth element oxide in cerium oxide in a deposition chamber by an electrochemically induced reaction of vaporized halides of rare earth elements and cerium with oxygen from at least one of oxygen gas and oxygen containing reactants to form said oxygen ion conducting oxide layers as the reaction product, comprising the steps of:
- reacting said vaporized halides with oxygen ions stemming form said oxygen gas or said oxygen containing reactants to form said oxygen ion conducting oxide layers, maintaining said oxygen gas and said oxygen containing reactants separated from said vaporized halides by said oxygen ion conducting oxide layers, whereby oxygen stemming from said oxygen gas or oxygen reactants at one side of said oxygen ion conducting oxide layers diffuses as oxygen ions through said oxygen ion conducting oxide layers and reacts with said vaporized metal halides at the other side of said oxygen ion conducting layers so as to form metal oxides and causing growth in thickness of said oxygen ion conducting oxide layers while, at the same time, forming free halide as reaction byproduct, and reacting said free halide with rare earth element oxide solution in cerium oxide with carbon thereby increasing the growth rate of said ion conducting oxide layers.
Dependencies are inferred from the claim text.