Back to results
US 5,986,795 AGranted
Deformable mirror for short wavelength applications
OwnerHenry N. Chapman, Donald W. Sweeneyinventors
Life of this patent
Estimating the term…
Abstract
A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.
Claims13
A deformable mirror, comprising:
- a face plate having a reflective coating on one side thereof that is compatible with radiation having a wavelength less than about 200 nanometers;
- a reaction plate;
- a plurality of actuators, each having first and second ends, wherein the first end is connected to the face plate and wherein the second end is connected to the reaction plate;
- and
- control means for individually controlling each of the plurality of actuators to deform the face plate and reaction plate.
2 more elements
Dependencies are inferred from the claim text.