Read-only memory and corresponding method of manufacturing by MOS technology
AssigneeSGS-Thomson Microelectronics S.A.
InventorsPhilippe Boivin, Richard Fournel
Life of this patent
Estimating the term…
Loading patent…
AssigneeSGS-Thomson Microelectronics S.A.
InventorsPhilippe Boivin, Richard Fournel
Estimating the term…
In a method for the manufacture of cells of a read-only memory, each cell comprises a MOS transistor formed by a first diffusion and a second diffusion of impurities of a first type in a semiconductor substrate with impurities of a second type. These two diffusions are separated by a channel surmounted by a gate. A thick oxide zone is made in the zone designed for the first diffusion, so that the making of the diffusions leads to a first diffusion in two parts separated by this thick oxide zone, a first part adjoining the channel and a second part on the periphery of the transistor. A particular encoding step makes it possible, by means of a mask, to eliminate the thick oxide in certain cells so that these encoded cells have a first continuous diffusion.
A method for the manufacture of read-only memory MOS transistor cells, comprising steps of:
A method for the manufacture of electrical connections on a semiconductor substrate comprising the steps of:
Dependencies are inferred from the claim text.