Apparatus for heating a transparent substrate utilizing an incandescent lamp and a heating disk emitting infrared wavelengths
AssigneeBalzers und Leybold Deutschland Holding Aktiengesellscaft
InventorsBernhard Cord, Karl-Heinz Schuller, Jaroslav Zejda
Life of this patent
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Abstract
A heating disk is located inside a vacuum chamber between a substrate holder inside the chamber and a lamp outside the chamber. The lamp emits radiation in a wavelength range which passes through a glass plate in the chamber wall but is absorbed by the heating disk, which may consist of graphite. When the disk is heated to 1000.degree. K. it emits radiation in a wavelength range which can be absorbed by a transparent substrate in the holder.
Claims15
Apparatus for heating a substrate in a vacuum chamber, said apparatus comprising
- a vacuum chamber having wall means with glass plate means therein,
- substrate holding means inside the vacuum chamber,
- lamp means outside said vacuum chamber, said lamp means emitting radiation in a first wavelength range which passes through said glass plate means toward said substrate holding means, and
- heating disk means between said glass plate means and said substrate holding means, said heating disk means having a high absorption of radiation in a said first wavelength range and a high emission of radiation in a second wavelength range above said fist wavelength range.
Apparatus for heating a substrate, comprising a vacuum chamber having wall means with glass plate means therein,
- substrate holding means inside the vacuum chamber,
- lamp means outside said vacuum chamber, said lamp means comprising means for emitting radiation through said glass plate means and focusing said radiation at a focal point inside said vacuum chamber, said focal point being between said glass plate means and said substrate holding means, and
- reflector means disposed between said glass plate means and said substrate holding means, said reflector means having central aperture means for admitting radiation from said lamp means.
Dependencies are inferred from the claim text.