Process for forming a morphological edge structure to seal integrated electronic devices, and corresponding device
AssigneeSGS-Thomson Microelectronics S.A.
InventorAlberto Perelli
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AssigneeSGS-Thomson Microelectronics S.A.
InventorAlberto Perelli
Estimating the term…
A process for the formation of a device edge morphological structure for protecting and sealing peripherally an electronic circuit integrated in a major surface of a substrate of semiconductor material includes formation above an intermediate process structure of a dielectric multilayer comprising a layer of amorphous planarizing material. The process also includes the partial removal of the dielectric multilayer so as to create at least one peripheral termination of the multilayer in the device edge morphological structure. Removal of the dielectric multilayer requires that the peripheral termination thereof be located in a zone of the intermediate process structure relatively higher than the level of the major surface, if compared with adjacent zones of the intermediate structure itself at least internally toward the circuit and in so far as to the device edge morphological structure.
An electronic device comprising:
An electronic device comprising:
Dependencies are inferred from the claim text.