US 5,966,632 AGranted

Method of forming borderless metal to contact structure

AssigneeMosel Vitelic, Inc.

InventorsMin-Liang Chen, Rebecca Yicksin Tang

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Abstract

The present invention is related to a method of fabricating borderless metal to contact structure. A dielectric layer is deposited on the silicon semiconductor wafer. The first photoresist pattern is formed by the conventional lithography technique. Then, the dielectric layer is partially etched to formed the first trench and second trench. The first trench is used as a contact hole, while the second trench is for second metal interconnection line. Thereafter, the second photoresist pattern which is only exposing the first trench region is formed. By using the second photoresist pattern as an etching mask, the dielectric layer is etched through to form the contact which is the place for the first metal line and second metal line to be electrically contacted. After the first and second photoresist patterns are stripped, the second metal layer is deposited to fill into the contact and the second trench as second metal interconnection lines. Finally, the second metal layer and a portion of the second dielectric layer are polished by chemical mechanical polishing (CMP) technique to planarize the wafer surface. A borderless metal to contact structure according to the present invention is achieved.

Claims4

Dependent claims

A method of fabricating the borderless metal to contact structure of integrated circuits, comprising the steps of:

(a) forming the MOSFET structure on a semiconductor silicon wafer, wherein said MOSFET comprises gate oxide, gate electrode, source/drain electrodes;
(b) forming the first dielectric layer on said semiconductor silicon wafer;
(c) forming the first conducting layer overlaying said first dielectric layer;
(d) forming the second dielectric layer overlaying said first conducting layer;
(e) forming the first photoresist pattern overlaying said second dielectric layer by the conventional lithography technique;
(f) partially etching said second dielectric layer to form the first trench and the second trench;
(g) forming the second photoresist pattern, wherein said second photoresist pattern only exposing said first trench region;
(h) etching the remaining of said second dielectric layer therein said first trench to form the contact hole;
(i) stripping said first photoresist pattern and said second photoresist pattern;
(j) depositing the second conducting layer to fill into said contact hole and said second trench;
(k) polishing a portion of said second dielectric layer and said second conducting layer to form the second conducting plug therein said contact hole and said second trench.

8 more elements

Dependencies are inferred from the claim text.