Capacitor designing method of MOS transistor
AssigneeNEC Corporation
InventorSinichiro Usui
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AssigneeNEC Corporation
InventorSinichiro Usui
Estimating the term…
A method for designing to optimize a capacitor structure (channel length L, channel width W and number of division n) in a MOS transistor, in which the capacitor has a capacitance C and a gate-channel resistance R. A period from rising of a potential of a gate electrode to rising of potential of a diffusion layer is assumed as t2, a capacitance per unit area is assumed as K1 and a resistivity of the gate channel is assumed as K2 (S1), a period for propagating potential from a center portion of the gate channel to the end of a diffusion layer is assumed as t1 which is expressed by t1=0.55 CR (S2). Then, from C=K1.multidot.LW (S2), and R=K2.multidot.L/W (S3), t1=0.55 K1.multidot.K2 L.sup.2 (S4). Assuming t1=t2, L={t2/0.55K1.multidot.K2}.sup.1/2 is calculated (S5, 6), and W=C/K1.multidot.L is calculated (S7). From the capacitor region, a maximum value Wmax of the channel width is determined (S8) to derive number of division by rounding up the fraction below decimal point of quotient of W/Wmax.
A method for designing capacitor of a MOS transistor, in which a drain region and a source region at both side of a gate channel region on a diffusion layer are shorted, and a capacitor having a capacitance C, a channel length L and a channel width W is formed by a portion where a gate electrode and said gate channel region overlap, with taking a capacitance of the overlapping portion of said gate electrode and said gate channel region per unit area being K1 and a resistivity of said gate channel region being K2, for application to a circuit, in which charge and discharge of said capacitor is performed at high speed, comprising a step of:
Dependencies are inferred from the claim text.