Mark for position detection, and mark detecting method and apparatus

A mark detecting method for determination of a position of a mark for position detection formed on an object with relation to first and second axes perpendicular to each other, said method comprising the steps of:

• preparing a mark detection apparatus having a detection center;
• disposing a central mark region of said mark near said detection center;
• and
• detecting a position in said fist axis direction of said mark by using said central mark region, and detecting a position in said second axis direction of said mark by using mark regions which are placed adjacent to both sides of said central mark region in said second axis direction.

A mark detecting apparatus for determination of a position of a mark for position detection formed on an object with relation to first and second axes perpendicular to each other, said mark having:

• a first pattern comprising a plurality of bar-like patterns having periodicity each of which extends with longer continuity in said second axis direction than in said first axis direction;
• and
• second patterns respectively disposed near both sides of said first pattern in said second axis direction, said second patterns comprising a plurality of bar-like patterns each of which extends with longer continuity in said first axis direction than in said second axis direction, wherein said plurality of bar-like patterns are formed with periodicity,
• said apparatus further comprising:
• a processor that photoelectrically detects said mark, and then obtains a position of said mark in said first and second axis directions by processing a detection signal of said mark.