Structure and method of formation of body contacts in SOI MOSFETS to elimate floating body effects
AssigneeAdvanced Micro Devices, Inc.
InventorsWitold Maszara, Srinath Krisnan
Life of this patent
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Abstract
A silicon-on-insulator MOSFET includes a silicon layer and an insulator layer positioned over a silicon substrate. An isolation region defines a silicon region positioned over the insulator layer. The silicon region further includes a source region, a drain region, and a doped body region. The drain region and source region do not extend to the bottom of the silicon region. A first metal conductor is electrically coupled to the side and top of the source region and the side of the body region. The first metal conductor establishes a potential at the body region to control floating body effects. A second metal conductor is electrically coupled to the top of the drain region.
Claims9
A silicon-on-insulator structure comprising:
- a silicon substrate layer;
- an insulator layer over said silicon substrate layer;
- a silicon region over said insulator layer;
- a body region formed within said silicon region, wherein said body region further includes a first doped region and a second doped region;
- an isolation region formed in said silicon region that surrounds said body region;
- and
- a metal connector that directly contacts a top and side of said first doped region and a side of said body region.
A method of forming a semiconductor-on-insulator structure in a structure including a bottom substrate layer, middle insulator layer, and top silicon layer, comprising:
- forming at least two isolation regions in said silicon layer to the depth of said insulator layer to define a silicon region;
- doping said silicon region;
- forming a first and second doped regions in said doped silicon region, wherein said first doped region and said second doped region are not as deep as said silicon region;
- and
- forming an electrical contact to directly contact a side of said silicon region and a top and side of said first doped region.
Dependencies are inferred from the claim text.