Method for forming a gate structure used in borderless contact etching
AssigneeMosel Vitelic, Inc.
InventorsWen-Yi Tan, Marlon Tsai, Ray Lee
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Abstract
A method for forming a gate structure used in borderless contact etching is disclosed including the steps described below. Forming a conductive layer on a substrate, followed by forming a first silicon nitride layer on the conductive layer. The next step is to pattern a gate electrode by etching all the layers formed in the steps mentioned previously. The following steps is to form a second silicon nitride layer on the surface of the gate electrode and the substrate. Finally, etching the second silicon nitride layer to form a nitride spacer on the side walls of the gate electrode. The altitude of the nitride spacer is higher than the altitude of the first silicon nitride layer.
Claims16
A method for forming a gate structure comprising the steps of:
- forming a conductive layer on a substrate;
- forming a first silicon nitride layer on said conductive layer;
- patterning a gate electrode by etching said conductive layer and said first silicon nitride layer;
- forming a second silicon nitride layer on the surface of said gate electrode and said substrate;
- and
- etching said second silicon nitride layer to form a nitride spacer on the side walls of said gate electrode, wherein said first silicon nitride layer and said second silicon nitride layer have different etching rates, and the altitude of said nitride spacer is higher than the altitude of said first silicon nitride layer.
The method as clam 6, wherein the pressure of said mixture is about 0.01 Torr, and the source power of the mixture is about 500 Watts.
A method for forming a gate structure used in borderless contact etching comprising the steps of:
- forming a conductive layer on a substrate;
- forming a first silicon nitride layer on said conductive layer, wherein said first silicon nitride layer is formed by plasma enhanced chemical vapor deposition (PECVD);
- patterning a gate electrode by etching said conductive layer and said first silicon nitride layer;
- forming a second silicon nitride layer on the surface of said gate electrode and said substrate, wherein said second silicon nitride layer is formed by low pressure chemical vapor deposition (LPCVD);
- and
- etching said second silicon nitride layer to form a nitride spacer on the side walls of said gate electrode, wherein said first silicon nitride layer and said second silicon nitride layer have different etching rates, and the altitude of said nitride spacer is higher than the altitude of said first silicon nitride layer.
The method as clam 13, wherein the pressure of said mixture is about 0.01 Torr, and the source power of the mixture is about 500 Watts.
Dependencies are inferred from the claim text.