US 5,964,948 A · Exhaust insert for barrel-type epitaxial reactors

Abstract

The exhaust insert is designed to reduce the eddy currents created within the reaction chamber so as to provide more even and predictable etching and/or epitaxial deposition. The exhaust insert is at least partially inserted into the exhaust port of the epitaxial barrel reactor. In particular, the exhaust insert includes an extension member that is adapted to be at least partially inserted within the exhaust port. The exhaust insert also includes an inlet member that extends beyond the exhaust port and into the barrel reactor. The inlet member is angled relative to the extension member so as to support the exhaust insert within the exhaust port of the barrel reactor. The angled design of the exhaust insert also serves to essentially scoop the exhaust gases into the exhaust port, thereby significantly reducing eddy current flow within the reaction chamber.

Claims18

Dependent claims

An exhaust insert for an epitaxial barrel reactor, the exhaust insert comprising:

an angled housing having an inlet member and an extension member adapted to be at least partially inserted within an exhaust port of the barrel reactor, wherein the inlet member is angled relative to the extension member so as to support the exhaust insert relative to the exhaust port of the barrel reactor such that the inlet member extends beyond the exhaust port and into the barrel reactor, wherein the inlet member and the extension member define respective longitudinal axes which are nonparallel, and wherein said housing also defines inlet and outlet ports at opposed ends thereof with the extension member opening through the outlet port and the inlet member opening through the inlet port;
and
a grill at least partially covering the inlet port of said housing.

An epitaxial barrel reactor comprising:

a reaction chamber defining at least one inlet and an exhaust port such that gas can flow therethrough;
a susceptor disposed within said reaction chamber for holding at least one wafer;
and
an angled exhaust insert that is at least partially inserted into the exhaust port, said exhaust insert comprising a housing having an inlet member and an extension member adapted to be at least partially inserted within the exhaust port, the inlet member being disposed at an angle relative to the extension member so as to support the exhaust insert such that the inlet member extends beyond the exhaust port and into the barrel chamber, said housing also defining inlet and outlet ports at opposed ends thereof wherein the extension member opens through the outlet port and the inlet member opens through the inlet port such that gas is exhausted from said reaction chamber by passing through said exhaust insert and into the exhaust port of said reaction chamber.

1 more element

Dependencies are inferred from the claim text.

Exhaust insert for barrel-type epitaxial reactors

Life of this patent

Exhaust insert for barrel-type epitaxial reactors

Life of this patent

Abstract

Claims18