Compact apparatus and method for storing and loading semiconductor wafer carriers

An automated local area semiconductor wafer fabrication system for automatically storing, loading and processing semiconductor wafers comprising:

• a semiconductor wafer fabrication tool comprising at least a first load lock;
• a transfer chamber operatively coupling said first load lock;
• at least one process chamber;
• and
• an apparatus for buffering wafers to be loaded to the wafer fabrication tool, said apparatus operatively coupled to the first load lock, comprising:
• a first load port for receiving at least one wafer carrier to be stored;
• a first vertical transfer mechanism, operatively coupling said first load port and extending upward from said first load port, dedicated to transferring the at least one wafer carrier between the first load port and a height greater than that of the wafer fabrication tool;
• at least one storage location located above the wafer fabrication tool and operatively coupling said first vertical transfer mechanism for receiving the at least one wafer carrier;
• a second vertical transfer mechanism operatively coupling said at least one storage location and extending downward from said at least one storage location, dedicated to transferring the at least one wafer carrier between the at least one storage location and the wafer fabrication tool;
• and
• a first wafer exchange port, operatively coupling said second vertical transfer mechanism and said first load lock.

A factory automation system comprising a first automated local area semiconductor wafer fabrication system comprising:

• a wafer fabrication tool comprising:
• at least a first load lock;
• a transfer chamber operatively coupling said first load lock;
• and
• at least one process chamber;
• and
• an apparatus for buffering wafer carriers to be loaded to the wafer fabrication tool, said apparatus operatively coupled to the first load lock, comprising:
• a first load port for receiving a wafer carrier to be stored;
• a first vertical transfer mechanism, operatively coupling said first load port and extending upward from said first load port, dedicated to transferring the wafer carrier to be stored between the first load port and a height greater than the height of the wafer fabrication tool;
• at least one storage location located above the wafer fabrication tool and operatively coupling said first vertical transfer mechanism for receiving the wafer carrier to be stored;
• a second vertical transfer mechanism operatively coupling said at least one storage location and extending downward from said at least one storage location, dedicated to transferring the wafer carrier between the at least one storage location and the wafer fabrication tool;
• and
• a first wafer exchange port, operatively coupling said second vertical transfer mechanism and said first load lock.

A method of providing a local area buffer of wafers for loading to a wafer fabrication tool, comprising:

• receiving a first wafer carrier at the wafer fabrication tool;
• placing the first wafer carrier in a first storage location above the wafer fabrication tool;
• retrieving a second wafer carrier from a second storage location above the wafer fabrication tool;
• and
• lowering the second wafer carrier to a tool load port of the wafer fabrication tool.