Integrated circuitry and method of forming a field effect transistor
AssigneeMicron Technology, Inc.
InventorMonte Manning
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Abstract
A method of forming a field effect transistor includes, a) providing a silicon substrate having impurity doping of a first conductivity type; b) providing source and drain diffusion regions of a second conductivity type within the silicon substrate, the source region and the drain region being spaced from one another to define a channel region therebetween within the silicon substrate; c) providing a gate relative to the silicon substrate operatively adjacent the channel region; and d) providing respective ohmic electrical contacts to the source region and the drain region, the electrical contact to the source region comprising a substrate leaking junction, the electrical connection to the drain region not comprising a substrate leaking junction. A field effect transistor is also disclosed.
Claims2
A method of forming a field effect transistor comprising the following steps:
- providing a silicon substrate having impurity doping of a first conductivity type;
- forming source and drain diffusion regions of a second conductivity type within the silicon substrate, the source region and the drain region being spaced from one another to define a channel region therebetween within the silicon substrate;
- forming a barrier layer over the drain region and over the source region;
- forming a gate relative to the silicon substrate operatively adjacent the channel region;
- and
- forming respective electrical contacts to the source region and the drain region, the electrical contact to the source region comprising a first conductivity type dopant implanted within the second conductivity type source region and beneath the barrier layer over the source region, the electrical contact to the drain region being separated from the drain region by the barrier layer over the drain region.
Dependencies are inferred from the claim text.