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US 5,962,654 AGranted
Alkoxyalkoxides and use to form films
AssigneeInternational Business Machines Operation
InventorsPeter Richard Duncombe, Deborah Ann Neumayer
Life of this patent
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Abstract
Metal alkoxyalkoxides wherein the alkoxy portion has 3-6 carbon atoms and the alkoxide portion has 2-6 carbon atoms are provided and are useful in forming films on a substrate.
Claims17
A metal alkoxyalkoxide wherein the alkoxy moiety of said alkoxyalkoxide has 3 to 7 carbon atoms, wherein the alkoxide moiety has 2 to 6 carbon atoms, and wherein the metal comprises at least one metal selected from the group consisting of Group I, Group II, Group IIIB, Group IVA, Group V, Group VIIB and Group VIII.
Dependencies are inferred from the claim text.