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US 5,962,180 AGranted
Radiation sensitive composition
AssigneeJsr Corporation
InventorsShinichiro Iwanaga, Akihiko Sakurai, Takayoshi Tanabe, Akira Tsuji
Life of this patent
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Abstract
A radiation sensitive composition comprising (A) a copolymer comprising recurring units of a p-hydroxystyrene unit and a styrene unit having an acetal group or a ketal group at the p-position, (B) a copolymer comprising recurring units of a t-butyl (meth)acrylate unit and a p-hydroxystyrene unit, and (C) a radiation sensitive acid-generating agent.
Claims14
A radiation sensitive composition comprising:
- (A) a copolymer which comprises a recurring unit represented by the following formula (1):
- ##STR7## wherein R.sub.1 is a hydrogen atom or a methyl group, and a recurring unit represented by the following formula (2):
- ##STR8## wherein R.sub.2 is a hydrogen atom or a methyl group, R.sub.3 is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cyclic alkyl group having 3 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms or an aralkyl group having 7 to 11 carbon atoms, R.sub.4 and R.sub.5 are each independently an alkyl group having 1 to 10 carbon atoms, a haloalkyl group having 1 to 10 carbon atoms, a cyclic alkyl group having 3 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, or an aralkyl group having 7 to 11 carbon atoms, or any two of R.sub.3, R.sub.4 and R.sub.5 may be bonded together to form a 5- to 7-membered ring;
- (B) a copolymer comprising a recurring unit represented by the following formula (3) and the recurring unit represented by the above formula (1):
- ##STR9## wherein R.sub.6 is a hydrogen atom or a methyl group;
- wherein the weight ratio of the copolymer (A) to the copolymer (B) is 70/30 to 90/10;
- and
- (C) a radiation sensitive acid-generating agent.
5 more elements
A radiation sensitive composition comprising:
- (A) a copolymer which comprises a recurring unit represented by the following formula (1):
- ##STR10## wherein R.sub.1 is a hydrogen atom or a methyl group, and a recurring unit represented by the following formula (2):
- ##STR11## wherein R.sub.2 is a hydrogen atom or a methyl group, R.sub.3 is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cyclic alkyl group having 3 to 10 carbon atoms, a cyclic alkyl group having 3 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms or an aralkyl group having 7 to 11 carbon atoms, R.sub.4 and R.sub.5 are each independently an alkyl group having 1 to 10 carbon atoms, a haloalkyl group having 1 to 10 carbon atoms, a cyclic alkyl group having 3 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms or an aralkyl group having 7 to 11 carbon atoms;
- (B) a copolymer comprising a recurring unit represented by the following formula (3) and the recurring unit represented by the above formula (1):
- ##STR12## wherein R.sub.6 is a hydrogen atom or a methyl group;
- wherein the weight ratio of the copolymer (A) to the copolymer (B) is 70/30 to 90/10;
- and
- (C) a radiation sensitive acid-generating agent.
5 more elements
Dependencies are inferred from the claim text.