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US 5,961,798 AGranted
System and method for vacuum coating of articles having precise and reproducible positioning of articles
AssigneeDiamond Black Technologies, Inc.
InventorsMerrill Gene Robinson, Arthur Bruce DeWald, Jr., Ronald Lee Remus, Kenneth Henry Frederick, Philip Anthony Napolitano, Daniel Garnett Wegerif, Angelo Venzon
Life of this patent
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Abstract
A system and method are provided for vacuum coating articles that includes a means for moving the articles in semi-continuous fashion successively through a series of vacuum chambers. A carousel is transported successively through each of the vacuum chambers that rotates the articles in an epicycloidal fashion. A means is also provided for precisely and reproducibly loading and unloading the carousel with the article.
Claims25
A system for vacuum coating of articles comprising:
- a) first, second, and third vacuum chambers located in series and separated by valves wherein the first chamber is for cleaning the articles, the second is for coating the articles, and the third is for removing the articles from vacuum without contaminating the second chamber;
- b) means for separately evacuating and pressurizing each of said three chambers;
- and
- c) means for moving the articles successively through each said chamber, said means comprising
- i) carousel means for rotating the articles in an epicycloidal fashion at least in said coating chamber, said carousel means further comprising:
- 1) a frame;
- 2) an endless gear mounted externally of said frame;
- 3) an endless chainbelt mounted for rotation about said frame;
- 4) means for rotating said chainbelt about said frame;
- and
- 5) a plurality of means mounted on said chainbelt for holding the articles, each said means including:
- a housing;
- a shaft rotatably secured in said housing, said shaft including means for securing the articles, and a planet gear mounted on said shaft and engaging said endless gear on said frame, said planet gear rotating externally about said endless gear in an epicycloidal fashion as said chainbelt rotates, whereby said shaft is rotated axially as said shaft rotates about said frame;
- and
- ii) means for transporting the carousel means successively through said chambers.
12 more elements
A system for sputter coating articles comprising:
- a) first, second, and third vacuum chambers located in series and separated by valves wherein the first chamber is for sputter etching the articles, the second is for sputter coating the articles, and the third is for removing the articles from vacuum without contaminating the second chamber;
- b) means for separately evacuating and pressurizing each of said three chambers;
- c) means for moving the articles successively through each said chamber, said means comprising
- i) carousel means for rotating the articles in an epicycloidal fashion at least in said coating chamber;
- and
- ii) means for transporting the carousel means successively through said chambers;
- and
- d) means for cleaning said articles prior to entry of said articles into said first chamber for sputter etching, said cleaning means including:
- i) a vapor honer for vapor honing the articles;
- ii) operator means for placing articles in an array for aqueous cleaning;
- iii) a plurality of alternating aqueous cleaning baths and rust inhibitor baths for cleaning the articles;
- iv) a dryer for drying the articles;
- v) a carriage for transporting the dried articles to said carousel means for sputter coating;
- and
- vi) operator means for loading said carriage with articles.
12 more elements
A system for vacuum coating of articles comprising:
- a) first, second, and third vacuum chambers located in series and separated by valves, wherein the first chamber is for cleaning the articles, the second chamber is for coating the articles and comprises material for vacuum coating placed at multiple locations in said second chamber, and the third chamber is for removing the articles from vacuum without contaminating the second chamber;
- b) means for separately evacuating and pressurizing each of the three chambers;
- and
- c) means for moving the articles successively through each said chamber, said means for moving comprising:
- i) carousel means for rotating the articles in an epicycloidal fashion at least in said coating chamber, said carousel means adapted for transport successively through each of said first, second, and third chambers and having a frame about which said articles are rotated, said frame extending longitudinally in the direction of movement of said carousel successively through each chamber;
- and
- ii) means for semi-continuously transporting said carousel means successively through said chambers.
4 more elements
Dependencies are inferred from the claim text.