Apparatus for establishing reference coordinates for a point on a component
AssigneeMicron Technology, Inc.
InventorsGayle Buhrer, Zane L. Drussel
Life of this patent
Estimating the term…
Abstract
An apparatus and method for establishing reference coordinates for a point on a component. The apparatus includes a base and a component carriage that is movably attached to the base for movement relative to the base along a first axis. The apparatus further includes a locator plate movably attached to the base for movement relative to the base along a second axis that is perpendicular to the first axis. Coordinate indicia is provided on the component carriage and reference indicia is provided on the locator plate. When the reference indicia is brought into registration with the point on the component, corresponding coordinates are identified where the reference indicia cross the coordinate indicia located on the carriage.
Claims18
Apparatus for establishing a reference coordinate for a point on a component, comprising:
- a component carriage configured to support a semiconductor wafer, said component carriage having coordinate indicia thereon;
- a locator plate movably supported relative to said component support carriage and having reference indicia thereon for registration with said component carriage.
Apparatus for establishing reference coordinates for a point on a component, comprising:
- a base;
- a component carriage configured to support a semiconductor wafer, said component carriage being movably attached to said base for movement relative thereto along a first axis;
- a locator plate movably attached to said base for movement relative thereto along a second axis that is perpendicular to said first axis;
- coordinate indicia on said component carriage;
- and
- reference indicia on said locator plate for registration with said component carriage.
Apparatus for establishing reference coordinates for a point on a semiconductor wafer, comprising:
- a base;
- a wafer carriage configured to support a semiconductor wafer, said carriage being movably attached to said base for movement along a first plane;
- a transparent locator plate movably attached to said base for movement along a second plane that is parallel to said first plane;
- coordinate indicia on said wafer carriage;
- reference indicia on said locator plate for registration with a point on wafer supported on said wafer carriage and alignment with said coordinate indicia on said wafer support carriage.
Apparatus for establishing at least one reference coordinate for a point on a semiconductor wafer, said apparatus comprising:
- a semiconductor wafer carriage movable in a first plane and having coordinate indicia thereon;
- and
- a locator plate movable in a second plane above said first plane and having referencing indicia thereon.
Dependencies are inferred from the claim text.