Robotic transport apparatus
OwnerTetsuji Togawa, Kuniaki Yamaguchi +1inventors
InventorsTetsuji Togawa, Kuniaki Yamaguchi, Kunihiko Sakurai
Life of this patent
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Abstract
A robotic transport apparatus is capable of providing an effective waterproofing function of working components without using mechanical seals. The robotic transport apparatus includes a robot body, an arm assembly extendably attached to the robot body, and a workpiece holding section attached to the arm assembly. A pan member for waterproofing of the robot body is provided between the workpiece holding section and the robot body and has an area not smaller than the workpiece holding section.
Claims25
A robotic transport apparatus for transporting a workpiece, said apparatus comprising a robot body and a workpiece holding section connected to said robot body, said workpiece holding section including a receiving section of recessed configuration for receiving a workpiece, said receiving section comprising:
- a contact surface for contacting a lower peripheral surface of the workpiece;
- and
- a bottom section surface positioned inwardly of said contact surface and located at a level at least 3 mm below said contact surface.
A robotic transport apparatus for transporting a workpiece, said apparatus comprising a robot body and a workpiece holding section connected to said robot body, said workpiece holding section including a receiving section of recessed configuration for receiving a workpiece, said receiving section comprising:
- a contact surface to for contacting a lower peripheral surface of the workpiece;
- and
- a bottom section surface positioned inwardly of said contact surface and located at a level below said contact surface, said bottom section surface having formed therein a drainage opening.
A workpiece holding section to be employed as a part of a robotic transport apparatus for transporting a workpiece, said workpiece holding section including a receiving section of recessed configuration for receiving a workpiece, said receiving section comprising:
- a contact surface for contacting a lower peripheral surface of the workpiece;
- and
- a bottom section surface positioned inwardly of said contact surface and located at a level at least 3 mm below said contact surface.
A workpiece holding section to be employed as a part of a robotic transport apparatus for transporting a workpiece, said workpiece holding section including a receiving section of recessed configuration for receiving a workpiece, said receiving section comprising:
- a contact surface for contacting a lower peripheral surface of the workpiece;
- and
- a bottom section surface positioned inwardly of said contact surface and located at a level below said contact surface, said bottom section surface having formed therein a drainage opening.
A polishing apparatus comprising:
- a polishing table;
- a workpiece holder for holding and pressing a workpiece against a polishing surface of said polishing table while supplying an abrasive liquid;
- a workpiece storage unit for storing workpieces to be polished;
- and
- a transport mechanism for transporting the workpieces between said workpiece storage unit and said workpiece holder, said transport mechanism comprising a robotic transport apparatus including a robot body and a workpiece holding section connected to said robot body, said workpiece holding section including a receiving section of recessed configuration for receiving a workpiece, said receiving section comprising:
- a contact surface to contact a lower peripheral surface of the workpiece;
- and
- a bottom section surface positioned inwardly of said contact surface and located at a level at least 3 mm below said contact surface.
A polishing apparatus comprising:
- a polishing table;
- a workpiece holder for holding and pressing a workpiece against a polishing surface of said polishing table while supplying an abrasive liquid;
- a workpiece storage unit for storing workpieces to be polished;
- and
- a transport mechanism for transporting the workpieces between said workpiece storage unit and said workpiece holder, said transport mechanism comprising a robotic transport apparatus including a robot body and a workpiece holding section connected to said robot body, said workpiece holding section including a receiving section of recessed configuration for receiving a workpiece, said receiving section comprising;
- a contact surface to contact a lower peripheral surface of the workpiece;
- and
- a bottom section surface positioned inwardly of said contact surface and located at a level below said contact surface, said bottom section surface having formed therein a drainage opening.
Dependencies are inferred from the claim text.