Wafer retaining mechanism
AssigneeIndustrial Technology Research Institute
InventorsTzong-Ming Wu, Gwo-Jou Huang
Life of this patent
Estimating the term…
Abstract
Disclosed is an improved wafer retaining mechanism comprising a canopy, and more than one set of retaining mechanisms affixed to appropriate locations of the canopy, the retaining mechanism being operative in coordination with wafers received within a wafer cassette and a chassis for urging the wafers in place. The wafer retaining mechanisms each comprises a link unit including a sliding rod, a lower link, a front link, an upper link, and associated pins, wherein thc link unit is featured with openings at respective pivots to serve as engaging sections which, in response to proper external forces, engage or disengage components of the link unit from respective pins so as to facilitate assembly or disassembly of the link unit.
Claims11
An improved wafer retaining mechanism, comprising:
- a canopy being a hollow lid for receiving a wafer cassette for storing a plurality of wafers, said wafer cassette being affix ed with a chassis at bottom thereof;
- and
- at least a link unit disposed at an appropriate location inside said canopy, said link unit comprising a sliding rod, a lower link, a front link, an upper link, and associated pins, wherein said sliding rod is slidably assembled to said canopy, said upper and lower links pivoting on said pivot link by said pins to jointly form said link unit, said front link being activated by a movement of said sliding rod to an expanded or a retracted position, whereby when said canopy receives said wafer cassette, said sliding rod urges against said chassis subjecting said front link to reach said expanded position for urging said wafers stored within said wafer cassette to align in place;
- characterized in that:
- said link unit is featured with engaging sections, for engaging said associated pins at appropriate locations of respective pivots, to facilitate assembly or disassembly of said components of said link unit.
Dependencies are inferred from the claim text.