Linearly moving mechanism

A linearly moving mechanism including a fixed part and a movable part having side surfaces opposing each other, said movable part being adapted to reciprocally move along a straight line relative to said fixed part, said linearly moving mechanism comprising:

• a first linear guide rail mounted to the side surface of said fixed part opposing said movable part;
• a second linear guide rail mounted to the side surface of said movable part opposing said fixed part so as to be in opposing relation to said first linear guide rail;
• a third linear guide rail disposed in opposing relation to said first linear guide rail in the state that said first and second linear guide rails oppose each other;
• a fourth linear guide rail disposed in opposing relation to said second linear guide rail in the state that said first and second linear guide rails oppose each other;
• a first movable member support for supporting first and third movable member means slidably engaged with said first and said third linear guide rails, respectively, toward one end of one of said first and third linear guide rails and toward the other end of the other of said first and third linear guide rails, respectively, in the state that said first and third linear guide rails are in opposing relation to each other;
• a second movable member support for supporting second and fourth movable member means slidably engaged with said second and said fourth linear guide rails, respectively, toward one end of one of said second and fourth linear guide rails and toward the other end of the other of said second and fourth linear guide rails, respectively, in the state that said second and fourth linear guide rails are in opposing relation to each other;
• and
• biasing means for imparting a biasing force to said movable part, a biasing force to said first movable member support, a biasing force to said second movable member support, and a biasing force to said third and fourth linear guide rails, respectively, so as to hold said first, said second, said third and said fourth linear guide rails in opposing relation to one another.

A semiconductor device transporting and handling apparatus including a test section disposed in a constant temperature chamber for testing a semiconductor device under test applied with a predetermined temperature stress and a transport means for grasping a semiconductor device under test applied with a predetermined temperature stress and transporting it to said test section in said constant temperature chamber, said semiconductor device transporting and handling apparatus being adapted to transport semiconductor devices to said test section, followed by transporting the semiconductor devices which have been tested in the test section out of the constant temperature chamber and sorting out the tested semiconductor devices on the basis of the test results, and being characterized by including a linearly moving mechanism which comprises:

• a first linear guide rail mounted to one side surface of said transport means;
• a head supporting means having a side surface opposing said side surface of said transport means and a device grasping head adapted to grasp a semiconductor device, and being vertically movable to transport a semiconductor device grasped by said device grasping head to said test section;
• a second linear guide rail mounted to the side surface of said head supporting means opposing said side surface of said transport means so as to be in opposing relation to said first linear guide rail;
• first and second movable member means slidably engaged with said first and said second linear guide rails, respectively;
• a movable member support supporting said first and said second movable member means thereon toward one end of one of said first and second linear guide rails and toward the other end of the other of said rails, respectively, in the state that said first and second linear guide rails are in opposing relation to each other;
• and
• biasing means for imparting a biasing force to said head supporting means and a biasing force to said movable member support, respectively, so as to hold said first and second linear guide rails in opposing relation to each other.

A semiconductor device transporting and handling apparatus including a test section disposed in a constant temperature chamber for testing a semiconductor device under test applied with a predetermined temperature stress and a transport means for grasping a semiconductor device under test applied with a predetermined temperature stress and transporting it to said test section in said constant temperature chamber, said semiconductor device transporting and handling apparatus being adapted to transport semiconductor devices to said test section, followed by transporting the semiconductor devices which have been tested in the test section out of the constant temperature chamber and sorting out the tested semiconductor devices on the basis of the test results, and being characterized by including a linearly moving mechanism which comprises:

• a first linear guide rail mounted to one side surface of said transport means;
• a head supporting means having a side surface opposing said side surface of said transport means and a device grasping head adapted to grasp a semiconductor device, and being vertically movable to transport a semiconductor device grasped by said device grasping head to said test section;
• a second linear guide rail mounted to the side surface of said head supporting means opposing said side surface of said transport means so as to be in opposing relation to said first linear guide rail;
• a third linear guide rail disposed in opposing relation to said first linear guide rail in the state that said first and second linear guide rails oppose each other;
• a fourth linear guide rail disposed in opposing relation to said second linear guide rail in the state that said first and second linear guide rails oppose each other;
• a first movable member support for supporting first and third movable member means slidably engaged with said first and said third linear guide rails, respectively, toward one end of one of said first and third linear guide rails and toward the other end of the other of said first and third linear guide rails, respectively, in the state that said first and third linear guide rails are in opposing relation to each other;
• a second movable member support for supporting second and fourth movable member means slidably engaged with said second and said fourth linear guide rails, respectively, toward one end of one of said second and fourth linear guide rails and toward the other end of the other of said second and fourth linear guide rails, respectively, in the state that said second and fourth linear guide rails are in opposing relation to each other;
• and
• biasing means for imparting a biasing force to said head supporting means, a biasing force to said first movable member support, a biasing force to said second movable member support, and a biasing force to said third and fourth linear guide rails, respectively, so as to hold said first, said second, said third and said fourth linear guide rails in opposing relation to one another.