Back to results
US 5,940,181 AGranted
Measuring method and measuring apparatus
AssigneeCanon Kabushiki Kaisha
InventorsIssei Tsubono, Fujio Makita, Hirofumi Nakanishi, Yasushi Matsushita
Life of this patent
Estimating the term…
Abstract
A method of measuring a lens comprises an aligning step of relatively aligning a plurality of specified annular zones on a surface of the lens with predetermined positions, and a determining step of determining an aspherical axis of the target surface aligned in the aligning step.
Claims18
A method of measuring a lens comprising:
- an aligning step of relatively aligning a plurality of annular zones on a surface of said lens with predetermined positions;
- and
- a determining step of determining an aspherical axis of the surface aligned in said aligning step.
An apparatus for measuring a lens, comprising:
- an incident wave front generating optical system for generating such a wave front that light beams are simultaneously incident perpendicularly upon only a plurality of annular zones on one surface of said lens;
- an interferometer for causing an interference by making the light beams reflected from the plurality of annular zones travel back along an incident light path;
- and
- a lens aligning mechanism, capable of adjusting a disposition of said lens, for aligning said lens on the basis of interference fringes formed by the light beams reflected from the plurality of annular zones.
1 more element
A method of measuring a lens, comprising:
- a rotating step of rotating said lens through an angle smaller than one rotation;
- a step of obtaining data about variations in condition of causing interference fringes formed by light from respective ones of the two surfaces of said lens;
- and
- an eccentricity measuring step of obtaining an eccentricity between the two surfaces of said lens on the basis of the variation in the condition of causing the interference fringes.
1 more element
An apparatus for measuring an eccentricity between two surfaces of a lens, comprising:
- incident wave front generating means for generating such a wave front that light beams are incident upon each of two surfaces of said lens;
- interfering means for causing interference by making light beams reflected from each of the two surfaces travel back along an incident light path;
- lens aligning means capable of making a disposing adjustment of said lens for aligning said lens on the basis of the interference fringes formed by respective ones of the light beams reflected from the two surfaces;
- and
- light beam adjusting means capable of making a disposing adjustment for shifting the light beams incident upon at least one of the two surfaces of said lens with a disposing adjustment of said lens by said lens aligning means.
2 more elements
Dependencies are inferred from the claim text.