Methods and apparatuses for singulation of microelectromechanical systems
AssigneeNational Semiconductor Corporation
InventorsPai-Hsiang Kao, Ranjan J. Mathew, Cornelio De Vera
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Abstract
Disclosed are methods and apparatuses that allow the dicing of wafers containing microelectromechanical systems into singulated individual dies that is economic to use and leaves substantially no residue on the surface of the individual dies. A method for packaging the dice singulated according to the present invention is also disclosed.
Claims13
A method of dicing a wafer containing a plurality of dies wherein at least some of the dies have fabricated microelectromechanical systems located on a first surface thereof, the method comprising:
- applying a substantially water soluble first protective layer to the wafer such that the first protective layer covers and encapsulates the microelectromechanical systems;
- applying a substantially water insoluble second protective layer over the first protective layer in a manner such that the second protective layer does not contact with any of the microelectromechanical systems;
- dicing the wafer to form a plurality of singulated individual dies using a water based lubricant material, wherein the dicing is done with the first and second protective layers in place to protect the microelectromechanical systems from damage during the dicing operation;
- and
- removing the first protective layer using a water based solvent after the wafer has been diced without substantially attacking the second protective layer causing the second protective layer to detach from the wafer;
- whereby the second protective layer protects the first protective layer from the lubricant and the first protective layer protects the microelectromechanical systems from the second layer during the dicing operation.
A method of dicing a wafer containing a plurality of dies wherein at least some of the dies have fabricated microelectromechanical systems located on a first surface thereof, the method comprising:
- applying a first protective layer to the wafer such that the first protective layer covers the microelectromechanical systems;
- applying a second protective lay over the first protective layer, wherein the first protective layer prevents contact between the second protective layer and the microelectromechanical systems;
- dicing the wafer to form a plurality of singulated individual dies;
- and
- removing the first protective layer without substantially attacking the second protective layer causing the second protective layer to detach from the wafer;
- and
- whereby the second protective layer protects the first protective layer from a lubricant used during the dicing and the first protective layer protects the microelectromechanical systems from the second protective layer.
A method of dicing a wafer containing a plurality of dies wherein at least some of the dies have with fabricated microelectromechanical systems located on a first surface thereof, the method comprising:
- applying a substantially water soluble protective layer to the wafer such that the protective layer covers the microelectromechanical systems;
- dicing the wafer to form a plurality of singulated individual dies;
- and
- removing the protective layer.
Dependencies are inferred from the claim text.