Device for transporting substrates

Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5), said apparatus comprising at least one displaceably disposed gripper (75), which can be displaced by means of a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate to the substrate support, wherein:

• said centering device comprises a cylindrical centering pin (157) and a positioning member (161) for displacing said centering pin toward the positioning device;
• said centering pin has a first diameter;
• the positioning device has a first surface (154) which points in the direction toward the substrate support;
• said at least one gripper comprises a plurality of grippers disposed on the positioning device and projecting beyond the first surface by a distance HG;
• said centering device further comprises a control pin which projects from said centering pin by a distance HZ which is greater than the distance HG;
• and
• said control pin has a second diameter less than the first diameter.