Polishing apparatus having robotic transport apparatus
AssigneeEbara Corporation
InventorsTetsuji Togawa, Kuniaki Yamaguchi, Kunihiko Sakurai
Life of this patent
Estimating the term…
Abstract
A robotic transport apparatus is capable of providing an effective waterproofing function of working components without using mechanical seals. The robotic transport apparatus includes a robot body, an arm assembly extendably attached to the robot body, and a workpiece holding section attached to the arm assembly. A pan member for waterproofing of the robot body is provided above the robot body and has an area not smaller than the workpiece holding section.
Claims34
A robotic transport apparatus for transporting workpieces between processing sites, said apparatus comprising:
- a robot body;
- a workpiece holding section connected to said robot body;
- and
- a pan member positioned above said robot body, said pan member having an area at least as large as an area of said workpiece holding section.
A polishing apparatus comprising:
- a polishing section for polishing workpieces;
- a cleaning section for cleaning the polished workpieces;
- a storage section for storing the workpieces;
- and a robotic transport apparatus for transporting workpieces between at least two of said polishing section, said cleaning section and said storage section, said robotic transport apparatus comprising:
- a robot body;
- a workpiece holding section connected to said robot body;
- and
- a pan member positioned above said robot body, said pan member having an area at least as large as an area of said workpiece holding section.
Dependencies are inferred from the claim text.