Photoimageable compositions comprising polyquinoline polymer and diazo compound
AssigneeHitachi Chemical Company, Ltd.
InventorsMatthew L. Marrocco, III, Makoto Kaji
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Abstract
Photoimageable polyquinoline compositions comprise a polyquinoline polymer, a diazonaphthoquinone and optionally a photosensitizer. The composition is prepared by dissolving the polyquinoline polymer, diazonaphthoquinone and photosensitizer in a solvent to form a solution, coating the solution onto a substrate and thereafter removing the solvent to form a film. The film is exposed to light through a photomask and developed by immersion in a selective solvent to yield a photopatterned dielectric film.
Claims60
A photoimageable composition comprising a polyquinoline polymer and a diazonaphthoquinone unit.
A method for preparing a photoimageable polyquinoline film comprising:
- dissolving a polyquinoline polymer and a diazonaphthoquinone unit in a solvent to form a solution;
- applying a coating of the solution to a substrate;
- and
- removing the solvent from the coated solution to thereby form a photoimageable film.
A method for preparing a photoimageable polyquinoline film comprising:
- (a) mixing a polyquinoline polymer and a diazonaphthoquinone unit selected from the group consisting of alkyl halide derivatives of diazonaphthoquinones and sulfonyl chloride derivatives of diazonaphthoquinones, and a solvent at a temperature and for a time sufficient for at least a portion of the diazonaphthoquinone unit to chemically bond to the polyquinoline polymer;
- (b) applying a coating of the solution resulting from step (a) to a substrate;
- and
- (c) removing the solvent from the coated solution to thereby form a photoimageable film.
A method for forming a photo-patterned polyquinoline-containing dielectric film comprising:
- providing a solution comprising a polyquinoline polymer, a diazonaphthoquinone unit and a solvent;
- applying a coating of the solution to a substrate;
- removing the solvent from the coated solution to thereby form a photoimageable film;
- exposing selected areas of the film with light;
- and
- developing the exposed film by immersion in a selective solvent which dissolves one of the exposed areas of the film or unexposed areas of the film.
Dependencies are inferred from the claim text.