Antireflective coating compositions
AssigneeShipley Company, L.L.C.
InventorsRoger F. Sinta, Timothy G. Adams, James Michael Mori
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Abstract
The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.
Claims9
An antireflective coating composition for use with an overcoated photoresist composition, the antireflective composition comprising a crosslinker and a resin binder comprises a polymer corresponding to the following formula:
- ##STR5## wherein each R and R.sup.1 is independently hydrogen or a substituted or unsubstituted alkyl group having from 1 to about 8 carbon atoms;
- each R.sup.2 is independently substituted or unsubstituted alkyl having 1 to about 10 carbon atoms;
- each R.sup.3 is independently halogen, alkyl having 1 to about 8 carbon atoms, alkoxy having 1 to about 8 carbon atoms, alkenyl having 2 to about 8 carbon atoms, alkynyl having 2 to about 8 carbon atoms, cyano, or nitro;
- m is an integer of from 0 to 9;
- and
- x is from about 10 to about 80 percent;
- and y is from about 5 to 90 percent.
An antireflective coating composition for use with an overcoated photoresist composition, the antireflective composition comprising a crosslinker and a resin binder comprises a polymer of the following structure:
- ##STR7## wherein x and y are mole fractions of the respective units.
Dependencies are inferred from the claim text.